The TiN, TiAlN, and TiAlSiN coatings were prepared on YT14 cutting tool surface with CAIP (cathode arc ion plating), the surface morphologies and phases were analyzed with FESEM (field emission scanning electron microscopy), and XRD (X-ray diffraction), respectively, and the coating parameters such as 3D surface micro-topography, grain size, surface height, hierarchy, profile height, and power spectral density, etc , were measured with AFM (atomic force microscope). The results show that the phases of TiN, TiAlN, and TiAlSiN coatings are TiN, TiN+TiAlN, TiN+Si 3 N 4 +TiAlN, respectively, while the surface roughness S a of TiN, TiAlN, and TiAlSiN coatings is 75.3, 98.9, and 42.1 nm, respectively, and the roughness depth S k is 209, 389, and 54 nm, respectively, the sequence of average grain sizes is TiAlN>TiN>TiAlSiN. The surface bearing index S bi of TiN, TiAlN, and TiAlSiN coatings is 0.884, 1.01, and 0.37, respectively, and the sequence of surface bearing capability is TiAlN>TiN>TiAlSiN. At the lower wavelength (10 2 -10 3 nm), the power spectral densities have a certain correlation, and the sequence of TiN>TiAlN>TiAlSiN, while the correlation is low at the higher wavelength (>10 3 nm).