Environmental Detect and Control SPM

 
 

Temperature and humidity Sensors are embedded in CSPM5500 system,
monitor by LED.

 
         
 

 

Temperature

Humidity

Range

-55150

0100RH

Resolution

0.01

0.03RH

Accuracy

0.1

0.5RH

Response time

5000ms

4000ms

Non-linearity

±0.18

1RH

Long-time stability

±0.08

1RH

 

   
     
 

Seal-air System can be employed to CSPM5500 for Environmental Control SPM.

 
         
 

     
 

Quartz glass window

     

  Specifications:
  * alloy seal cab for disturbance isolation
  * acrylonitrile-butadiene O-ring for better seal
  * Large Quartz glass window for sample board-band ray radiation
  * Adjustable lightening device inside for processing monitor
  * Air inlet-outlet port for environmental control

         
 

     
 

Environmental Control SPM

     
 
 

Sample-heating-stage System can be employed to CSPM5500 for sample temperature Control.

 
 

 

   
       
 

Diameter

30mm

Power

6W (Max.)

Temperature

150℃ (Max.)

Accuracy

0.5℃

         
 

     
 

Sample-heating-stage System