We report a controllable, economical and rapid preparation of amorphous selenium (a-Se) thick films by using e-beam evaporation technique. Characterization including X-ray diffraction, Raman and FTIR spectroscopy confirm the amorphous nature of the as-grown films. The films in thickness as high as 2670208m were obtained with a deposition rate of 2.11–2.30208m/min. A Raman shift peak at 252.402cm 611 and the absorption of the vibration band at 487.9 and 737.702cm 611 in FTIR spectra are related to the disordered Se chains and Se 8 rings assigned to a-Se. All the results indicate that the e-beam evaporation is a promising technique for a-Se films fabrication.