PET(polyester) plain woven fabric deposited with nano-structured silver thin film was prepared by RF (radio frequency) magnetron sputtering at room temperature. The effect of different sputtering technical parameters on the morphology and particle diameters of the nano-structured silver thin film was characterized by AFM(atomic force microscope)and the conductivities of silver thin films were also analyzed under different sputtering technical parameters. The results indicated
that the nanoparticles size of sliver thin films increased with higher sputtering power, the conductivity of sliver thin films was first decreased and then markedly enhanced; The nanoparticles size of sliver thin films decreased with higher gas pressure, the conductivity was markedly decreased; The nanoparticles size of sliver thin films increased with longer sputtering time, the conductivity was markedly enhanced, The best conductivity was achieved at the sputtering time of
15min.