Teflon film was prepared by ion beam enhanced deposition method. The structure and microtribological properties were studied by PHI-5300, FT-IR, XRD and atomic force and friction force microscope (AFM/FFM). The results show that the deposited Teflon is in crystalline state, and its structure is the same as the bulk Teflon. There are two periods in the friction and wear tests for Teflon film. When the load is less than 70 nN, the micro friction force is linear with the load, and the Teflon does not have the lubricity. But when the load is greater than 70 nN, the friction force of Teflon film will stay nearly constant, and worn marks will be created in the friction and wear process. The worn depth of Teflon film increases linearly with the load.