Atomic Force Microscope (AFM) has been proven
to be a useful tool to characterize and change the sample surface
down to the nanometer scale. However, in the AFM based nano
manipulation, the main problem is the lack of real-time sensory
feedback for a user, which makes the manipulation almost in the
dark and inefficient. In this paper, the AFM probe micro
cantilever-tip is used not only as an end effector but also as a
three dimensional (3D) nano forces sensor for measuring the
interactive forces between the AFM probe tip and the object or
substrate in nanomanipulation. The nano forces acting on
cantilever-tip is modeled and the real-time PSD signals are used
to calculate the forces. With new parameters calibration method
used, the real 3D nano forces can be easily got and then fed to a
haptic/force device for operator to feel, thus real-time
manipulation forces information is obtained, with which the
efficiency of nanomanipulation can be significantly improved.
Nano-imprint experiments verify the effectiveness of 3D forces
sensing system and efficiency improvement of nano manipulation
using this system.