In order to investigate the influence of surface microtextures on the wettability, Multiply-alkylated cyclopentane, a novel hydrocarbon mobile lubricant, was deposited on silicon surface treated by different cleaning and etching processes. Using an atomic force microscope, measurement on the silicon surface was made to fully characterize the surface. Contact angles of water on these surfaces were measured using a DSA100 contact angle meter. The result indicates the wettability of the hydroxylated silicon wafer and the silicon wafer with a monohydride-terminated surface is better than the cleaned silicon wafer, which are mainly caused by topological structure changes of the surface. Furthermore, the nano-adhesion property was also measured. The different behavior in adhesion forces is due to the differing surfaces of the silicon wafers.