Indium tin oxide (ITO) thin films with different thicknesses were prepared on polyethylene terephthalate (PET) substrates by RF magnetron sputtering at room temperature. The structure, morphology, electrical, and optical properties of the films were investigated by X-ray diffraction, atomic force microscopy, spectrophotometer, and van der pauw method,
respectively. The experimental results show that the surface grain size, roughness, and carrier concentration of the films
increase with the increase of thickness. The sheet resistance, Hall mobility, and transmittance decrease as the film thickness increases. When the thickness is 148 nm, the sheet resistance is 26.5 Ω􀀀-1, mobility is 19.1 cm2V-1s-1, and carrier concentration is 8.43×1020 cm-3.