A s an ti一refleeting thin fi lm sand trans Parenteleertodesofsolarcells, indimutin oxide (ITO )thin film s we re P reP a red on g lass su b stra te s b y D C m ag n etr o n sPu tteri n g Pro ee ss.T h e m ain sP ut eri n g eo n d ition s w ere sP u tteir
n g P o w e几su b star te tem P ear ttlre an d w o kr P er ssu re. T h e in fl u en e e o f th e ab o v e sP u t e ir n g eo n d itio n s o n ht e tran sm itan ee and condu ctivity of the dePosited IT O fi lm s w as investigat ed.T he exP eri m enta l re su lts show that, the tran smitance and the resistivity deerease as the sPut eri ng Pow erinereasesfr om 30 to 90 W. W hen the sub stra te tePm erartu e inereases fr om 2 5 to 150 Co , the rt an sm itanee in eer ases slightly w hereas the resistivity deeer ases, A sthe w okr Pressru e inereases fr om 0 .4 to 2 .0 P a, the transm itanee deereases an d ht e er sistivity in eer ases.W hen the spute子ing pow eo subsart tetem pear tu er and w o改per ssuer ar e30 议一so co , 0.4 Pa er speetivel又山exTo thsn film sehx ib itgood elecirt ealand opticalp ropert ies, w ith er sistivity b elow 10一4 􀀁 e􀀂m and ht e rt an sm itan ee in ht e visible w av e b an d b e y on d 8 0 % . T h erefo re, th e IT O th in fi lm s are su itab le as tran sP ar en t e le ert o d es o f so lar cell