DLC (diamond-like carbon) films on the inner surface of the PET (polyethylene terephthalate) bottles were
deposited by dual RF-PECVD (radio frequency plasma-enhanced chemical vapor deposition) plasmas with C2H2 as the
carbon source and Ar as the dilution gases. As the barrier layer of gas permeation and humidity in the inner side of the
PET bottle, the influence of the DLC film structure, composition and morphology analyzed by FTIR (Fourier transform
inferred), AFM (atomic force microscope) and SEM (scanning electron microscope) on the barrier properties were
performed. It obtains that the DLC film can be synthesize in the inner side of the PET bottle. The barrier property is
depended on the plasma parameters. The DLC film deposited only in CCP (capacitively coupled plasma) source shows
a micro-cracks, which is detrimental for barrier performance. In contrast, in dual radio frequency plasma source, i.e.
ICP (inductively coupled plasma) source incorporated with CCP source, micro-cracks are disappeared, the OTR
(oxygen transmission rate) is significantly improved.