In thiswork,Fe-dopedZnOthinfilmswerepreparedbysol–gelmethodonSiandglasssubstratesand influenceofFe-dopingconcentrationonthestructuralandopticalpropertiesofthefilmswasstudied. The Xraydiffraction(XRD)analysesshowthatalltheZnOthinfilmspreparedinthisworkhavea hexagonalwurtzitestructureandarepreferentiallyorientedalongthe c-axis perpendiculartothe substratesurface.After1at%Feisdoped,thecrystallinequalityandthepreferentialorientationofZnO thin filmareimproved.However,whenFe-dopingconcentrationisabove1at%,thecrystallinequality and the preferentialorientationofZnOthinfilmisweakenedinturn.Thesurfacemorphologyanalyses of thesamplesshowthattheZnOgrainsizestendtodecreasewiththeincreaseofFedoping concentration.Fe incorporationhardlyinfluencesthetransmittanceinthevisiblerange,buttheoptical band-gapsofZnOthinfilmsgraduallyincreasewiththeimprovedFe-dopingconcentration.The
photoluminescencespectradisplaythatallthesampleshaveanultravioletemissionpeakcenteredat 381 nmandthe1at%Fe-dopedZnOthinfilmhasthestrongestultravioletemissionpeak.Theabove results suggestthat1at%Fe-incorporationcanimprovethecrystallinequalityandenhancethe ultravioletemissionofZnOthinfilm.