Nanoscale titanium dioxide (TiO2) films were deposited on the surface of polyester nonwovens by using direct current reactive magnetron sputtering. The effect of oxygen flow on the surface structures and properties of the fabrics was investigated in this article. The surface morphology, microstructure, and the chemical composition of TiO2-coated fibers were characterized by atomic force microscope, X-ray diffraction, and X-ray photoelectron spectroscopy. The effect of oxygen flow on deposition rate, white degree, and light transmission properties of the fabrics with nanoscale TiO2 films were examined. The test results proved that the oxygen flow was a key factor in sputter processing. The deposition speed decreased and the white degree of the fabric increased with increasing oxygen flow. The ultra-violet absorption by
the polyester nonwoven fabric with TiO2 coatings was also enhanced as the oxygen flow increased in a proper range.