Nanoscale titanium dioxide (TiO2) films were deposited on the surface of polyester nonwovens by using direct current (DC) reactive magnetron sputtering. The effect of coating thickness on the surface structures and properties of TiO2 coated fabrics was investigated by atomic force microscope (AFM), X-ray diffraction (XRD), energy dispersive X-ray
analysis system (EDX), scanning electron microscope (SEM), and antistatic test in this article. The results
indicated that the grain sizes of the sputtered clusters increased and the coating layer became more compact
as film thickness was increased, but the crystal structure did not have any significant change. At the same
time, the film mechanical properties and antistatic performance in general depended strongly on the film
thickness which could lead to the optimum thickness for a particular application.