Until now, there are few reports on the effect of process conditions on abrasion resistance, which is the
most important mechanical property of optical films. Broadband antireflective (AR) films composed of
SiO2and TiO2, whose bands are from 620 to 860 nm and whose reflectivity is less than 0.5%, are prepared
by electron-beam evaporation (EBE) at different temperatures, ion beam energies, and cooldown times.
The structural properties of the films are investigated by atomic force microscopy, including the surface
roughness, crystallinity, shape, uniformity, and compactness of the grain. The abrasion resistance of
the samples is tested according to MIL-C-48497A4.5.5.1 standard. We discuss the relationship between
abrasion resistance and the structural properties produced under different process conditions, such as
preparation temperature, energy of the ion beam, and cooldown time. Grain shape and surface roughness
are indicated to codetermine the abrasion resistance of the film. Further, the AR film with triangular grain
and moderate roughness shows good abrasion resistance.