Nanotribological properties play an important role in many applications, such as micro/nanoelectromechanical systems (M/NEMS) and high-density storage technologies (hard drivers). Therefore, it is important to study the nanotribological properties of these surfaces which are separated by only a couple of nanometers. Patterning feature or surface texture with micro/nano-scale dimension is of great importance for solving these problems. In this work, micro/nano-patterned Au surfaces with different topography features were fabricated via a convenient method and then chemically modified by alkanethiol SAMs for optimization of their nanotribological performance. Surface composition and morphologies of Au surfaces with different micro/nano-textures and chemical modification were evaluated by XPS, contact angle measurements, 3D non-contact optical microscopy and AFM. AFM/FFM was used to investigate the nanotribological behaviors of Au surfaces with different micro/nano-textures and corresponding chemical modification. Results obtained in this work demonstrated the feasibility of fabricating surface textures with micro/nano-scale cylindrical holes and the possibility of controlling chemical composition on surface to improve the nanotribologcal performance of Au surface. Nanotribological properties of textured Au surfaces were greatly determined by the fractional surface coverage of cylindrical holes and consequent chemical modification. Au textured surface with dense cylindrical holes and further chemically modified with self-assembly monolayer showed significantly enhanced hydrophobicity and nanotribological performance compared with Au textured surface with sparse cylindrical holes without chemical modification.