A nanosecond response waveguide electro-optic(EO) switch based on ultraviolet(UV) sensitive polymers of Norland optical adhesive(NOA73) and Dispersed Red 1(DR1) doped SU-8(DR1/SU-8) is designed and fabricated. The absorption properties, refractive indexes, and surface morphologies of NOA73 film are characterized. The single-mode transmission condition is computed by the effective index method, and the percentage of optical field distributed in EO layer is optimized to be 93.78 %. By means of spin-coating, thermal evaporation, photolithography, and inductively coupled plasma etching,a Mach–Zehnder inverted-rib waveguide EO switch with micro-strip line electrode is fabricated on a silicon substrate.Scanning electron microscope characterization proves the physic-chemical compatibility between NOA73 cladding and DR1/SU-8 core material. The optical transmission loss of the fabricated switch is measured to be 2.5 d B/cm. The rise time and fall time of switching are 3.199 ns and 2.559 ns, respectively. These results indicate that the inverted-rib waveguide based on UV-curable polymers can effectively reduce the optical transmission loss and improve the time response performance of an EO switch.

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作者

Zhao Xu-Liang,Yue Yuan-Bin,Liu Tong,Sun Jian,Wang Xi-Bin,Sun Xiao-Qiang,Chen Chang-Ming,and Zhang Da-Ming.

期刊

Chinese Physics B,24:4,044101(2015)

年份