1. IntroductionResearch into the use of surface-texturing to change the contact area between surfaces has reached the consensus that it adjusts the surface frictional performance. At a macro-scale, the regular distributed holes on the piston ring are one of the earliest and most familiar commercial applications of surface-texturing. Nowadays with the rapid development of nanotechnology, many interesting phenomena have been found at the nanometric scale [1]. The mechanical system is gradually stepping into the nanoscale. More and more miniaturised, and integrated components and devices such as electrostatic micro-motors, micro-actuators, micro-sensors, and micro-systems, have attracted many researchers [2-3]. However, as the mechanical system or components shrink to the micro/nanometre scale, adhesion and friction problems, because of the dramatically increased surface-area-to-volume ratio [4], become a major reason for the failure of MEMS [5] and limit further developments in the MEMS fields. J. Bons et.al [6-8] has investigated the tribological performance of micro/nanostructure surface induced by femtosecond laser. In their tribology measurements, larger loads of 1N and ball diameter of 10mm can easily destroy the micro/ nanostructures of metal surface. However, AFM colloidal probe technique can effectively reveal the friction mechanism of micro/nanostructure surface, which have been more and more applications in tribology research. According to the frictional behaviour after surface texturing, many scholars [9-12] have adopted various methods, for instance laser lithography, electro-beam lithography and chemical vapour deposition, to fabricate nanotextured surfaces and investigate its nanotribological properties.