Micro-assembling Te¯on/Si3N4 multilayer ®lm was developed by ion beam alternating sputtering Te¯on and Si3N4 ceramic targets. The structural, mechanical and microtribological properties were studied by PHI-5300, FTIR, XRD and atomic force and friction force microscope(AFM/FFM). The results show that the multilayer consists of Si3N4 component and crystalline Te¯on. The hardness of the multilayer is  less than that of Si3N4; but the toughness of Te¯on/Si3N4 is greatly improved. The friction coef®cient of Te¯on/Si3N4 multilayer is lower thanthat of Si3N4 ®lm, and the wear resistance of Te¯on/Si3N4 multilayer is much greater than that of Te¯on ®lm. The friction force of Te¯on/Si3N4 ®lm is linear with the load in nanoscale. The worn track will be formed in Te¯on and Te¯on/Si3N4 ®lm when the load is greater than 70 nN. q1999 Published by Elsevier Science Ltd. All rights reserved.